The COMET RF power supply system consists of key components such as impedance matching network, RF generator, and vacuum capacitor, which can accurately control the plasma treatment process of silicon crystal disk and glass substrate, ensuring the high quality and performance of the product.
As a key component, RF generators are not only active in the manufacturing of semiconductors and flat panel displays, but also widely used in industrial lasers and medical applications, demonstrating strong versatility and adaptability. COMET's RF power supply system is widely used in plasma processing processes, such as etching, deposition, and cleaning, and is a key equipment in semiconductor manufacturing and flat panel display production.
